0…10 sccm to 0…3000 sccm

PMFc3000
AWM3000
  • flow range: 0-30 sccm up to 0–1000 sccm
  • output: AWM3000 equivalent
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PMF2000
  • flow range: 0-10 sccm up to 0–200 sccm
  • 1…5V linear output
  • digital I²C 14 bit
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0…15 SLM to 60 SLM

PMF5000 ELBOW
  • 0…15 SLM up to 60 SLM
  • linear output 1…5
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PMF5000 STRAIGHT
  • 0…15 SLM up to 60 SLM
  • linear output 1…5V
  • digital I²C 14 bit
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PMF83000
  • 0…15 SLM up to 0…100 SLM
  • linear output 0,5…4,5V
  • digital I²C 14 bit
  • Parylene coating standard
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0…3000 sccm to 0…6 SLM manifold

PMFc43000
AWM43000
  • flow range: 0-1000 sccm up to 0–6000 sccm
  • non linear output 1…5
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PMF6000
Manifold
  • flow range: 0-1000 sccm up to 0–6000 sccm
  • linear output 1…5
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50 SLM to 300 SLM

PMFC720P1
AWM720P1
  • flow range: 0-200 SLM
  • output: AWM720P1 equivalent
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PMF4000
  • flow range: 0-15 SLM up to 0–300 SLM
  • 1…5V linear output
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PMF86000
  • 0…50 SLM up to 0…300 SLM
  • linear output 0,5…4,5V
  • digital I²C 14 bit
  • Parylene coating standard
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D-56745 Weibern

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