Posifa Microsystems was founded as manufacturer of semiconductor sensor chips in California (Silicon Valley) and provide mass air flow sensors for air and gas. The embedded sensor chips are coated with SiCa. Which makes the sensors very robust against particles and liquids. With the Pirani vacuum sensors by Posifa we get into a range of 0.001 to 30 Torr.
- 0…10 sccm to 0…3000 sccm
- 0…3000 sccm to 0…6 SLM manifold
- 0…6 SLM to 50 SLM
- 50 SLM to 300 SLM
- Pirani Vacuum Sensors